On-Wafer Temperature Monitoring Sensor for Condition Monitoring of Repaired Electrostatic Chuck

The temperature of electrostatic chuck (ESC), a wafer susceptor used in semiconductor etch equipment, must accurately control the wafers during etching process to obtain uniform and consistent results. Failure precise can lead rejection from high-volume manufacturing site (one most high-cost equipment components which be repaired for its extended use). In this research, we propose wireless-type on-wafer monitoring system (OTMS) easier faster help measurements ESC atmospheric vacuum conditions. proposed method, effectively measure distribution ESC, should manage operational condition ESC. A successful demonstration 300 mm size OTMS parts enhanced quality assurance with deviation ±3.83 °C over 65 points measurement.